Seals & Polymer Components for Semiconductor & Chemical Processing
Seals & Polymer Components for Semiconductor & Chemical Processing
Application Overview
Semiconductor wet-process and chemical processing equipment demand ultra-high chemical resistance, low-outgassing and zero-metal-ion contamination. Even trace metal leaching or particle release can ruin wafer yields. TOPSEALS supplies high-purity polymer seals and machined components for wet-etch, cleaning, chemical-delivery and fluid-handling systems.
Key Operating Challenges
- Exposure to strong acids, bases and organic solvents
- Strict requirements for low-outgassing and particle generation
- Prohibition of metal-ion leaching to avoid wafer contamination
- Continuous cyclic chemical contact and temperature swings
Recommended Sealing & Polymer Parts
- FFKM Perfluoroelastomer O-Ring - broad chemical resistance for wet-process fluid circuits
- Virgin-PTFE Machined Parts - high purity chemical resistant static and sliding components
- CNC-PEEK Components - structural high strength polymer parts for chemical process hardware
- FKM O-Ring & Gaskets - suitable for moderate chemical resistance auxiliary circuits
What Products Are NOT Suitable For This Application
- Standard NBR, SBR rubber seals: poor chemical resistance, heavy metal-ion leaching risk
- Metal-reinforced composite seals: risk of metal-ion contamination for semiconductor wet-process
- Generic filled-PTFE with mineral fillers: particle shedding and contamination risk
Typical Installation Positions
- Wet-process chemical delivery manifold ports
- Etch bath and cleaning tank flange connections
- Chemical pump shaft and chamber seals
- Fluid valve body static sealing interfaces
Frequently Asked Questions
Q: What is the difference between FFKM and FKM for semiconductor applications?
A: FFKM offers near universal chemical resistance against aggressive wet-process chemicals. FKM is only suitable for less harsh auxiliary circuits and cannot handle strong oxidizing acids.
Q: Can standard PTFE be used for semiconductor wet-process?
A: Virgin-PTFE is acceptable. Filled-PTFE with mineral fillers is not recommended, as fillers may shed particles and cause contamination.
Request Custom Sealing Quote
Share your chemical media, temperature, pressure and cleanliness requirements. Our engineering team will recommend suitable high-purity material and dimension for your semiconductor & chemical processing project.
